The trace gas analyzer is for low pressure chamber monitoring needs, it provides parts per billion H2O detection limits at very low pressures ( <50 Torr) for inert, toxic gases.
- Industry-leading parts-per-billion detection
- Unprecedented speed of response
- Widest available dynamic range
- Absolute measurement (freedom from calibration gases)
- Flexibility: up to four (4) measurement points per electronics module
- Extremely low cost of ownership