Next-Generation Trace Gas Analyzer for Detection & Continuous Monitoring of Hydrogen Chloride (HCl) Airborne Molecular Contaminants (AMCs) in Semiconductor Cleanrooms
You can spend a long time “looking” for Airborne Molecular Contaminants (AMCs) when the catastrophic product performance or yield loss is discovered at your device final test stage; or you can deploy Tiger Optics’ T-I Max HCl analyzer to locate and to monitor these invisible defect generators, commonly found lurking in and around equipment, personnel, wafer carriers and cleanroom bays.
In today’s advanced semiconductor processing, the residual gases, vapors and chemicals emanating from the various materials, accelerated processing operations, and substrate storage and transport have become a critical concern. So much so that the International Technology Roadmap for Semiconductors (ITRS) now highlights AMC contamination as a key technical challenge in achieving and sustaining low defect rates on devices.
With a particular focus on the major contributors to the “chemical contamination” element of AMCs, the T-I Max HCl analyzers, based on Tiger’s new global platform, can detect and continuously monitor HCl with an unprecedented combination of sensitivity, selectivity, and speed of response.
Tiger Optics’ GO-cart for AMCs adds additional flexibility by providing a mobile platform that can be moved quickly to different critical monitoring points (see PDF brochure).
Based on Tiger Optics’ new global platform, the T-I Max HCl monitor for Airborne Molecular Contaminants (AMC) delivers unprecedented performance, including:
- Sensitive, absolute measurement technique, using Cavity Ring-Down Spectroscopy (CRDS)
- Dramatically improved speed of response & parts-per-trillion detection limits
- Drift-free, with calibration traceable to the world’s leading reference labs
- Lowest Cost of Ownership—maintenance-free
Applications
- Airborne Molecular Contaminants
- Research & Development
