Leading choice for ultra-high purity gas users
Tiger Optics’ HALO OK oxygen analyzer monitors oxygen impurity levels with part-per-trillion accuracy, drift-free stability and instantaneous response. HALO OK/OK+ is easy and fast to install, and effortless to maintain, with built-in zero verification. Its robust design—free of moving parts—delivers a high Mean Time Between Failure (MTBF) rate and a very low Cost of Ownership (CoO).
With its patented catalytic conversion technique, utilizing a minute amount of hydrogen to cleanly and safely convert oxygen to moisture, the OK offers a fully laser-based solution for Continuous Quality Control of your process. Based on powerful Cavity Ring-Down Spectroscopy, the HALO OK aligns with the SEMI F-112 standard for moisture dry-down characterization of gas systems. Pair the new HALO OK with our HALO KA for ppt-level moisture measurement to enjoy the many advantages of profit-boosting CRDS technology for both critical contaminants.
Designed for trace-level oxygen analysis, the HALO OK offers:
- Industry-leading parts-per-trillion detection capability
- Unprecedented speed of response
- Wide dynamic range
- Absolute measurement (freedom from need for calibration gases)
- Low maintenance and cost of ownership – no sensor replacement required and no liquid sensor consumables needed
- Compact, portable package, ideal for both fixed and mobile cart installation
- Direct measurement in many matrices
Applications
- Gas Quality Control
- Gaseous CRMs & Calibration Gas Mixtures
- High-Purity Gases & Systems
- Hydrogen Fuel Cells
- Research & Development
Download Data Sheet
HALO™ OK+ Ultra-Trace Level Oxygen Analyzer
Designed for ultra-trace-level O2 analysis as low as 20 ppt, the HALO OK+ offers:
- Industry-leading detection capabilities
- Fast speed of response—Speed+ included
- Multiple background gases: N2, Ar, H2 and He
- No costly liquid consumables to buy, stock and add frequently to maintain sensor health and measurement accuracy
- No calibration requirements and lowest cost of ownership
APPLICATIONS
- Semiconductor Bulk Gases
- UHP Gas Quality Control
- Purifier Qualification
HALO OK+ Detection Capabilities
| O2 Detection |
Range |
Detection Limit (LDL) 3σ/24h |
Precision (1σ/24h) |
| in He |
0 – 0.5 ppm |
20 ppt |
7 ppt |
| in Ar |
0 – 1 ppm |
36 ppt |
12 ppt |
| in H2 |
0 – 1 ppm |
60 ppt |
20 ppt |
| in N2 |
0 – 2.5 ppm |
75 ppt |
25 ppt |
Download Data Sheet
HALO OK Enhanced Safety Model (using 3% H2/97% N2 mixture utility gas)
| Detection and Matrix |
Range |
LDL†,‡ |
Precision (1σ) @ zero |
| O2 in He |
0 – 0.5 ppm |
400 ppt |
17 ppt |
| O2 in Ar |
0 – 1 ppm |
400 ppt |
30 ppt |
| O2 in H2 |
0 – 2 ppm |
400 ppt |
50 ppt |
| O2 in N2 |
0 – 2.5 ppm |
400 ppt |
70 ppt |
† LDL is dependent upon the quality of the sample gas and the integrity of the sampling system. Linear Fit Mode may be used to zero readings.
‡ LDL is limited by minimum achievable O2 concentration, not by 3σ baseline noise.
§ LDL of 1000 ppt requires addition Gas Panel and Linear Fit Mode.
Please contact us for more information.
¶ The Extended Range (ER) option is available as add-on to any Standard Model
# The High Range (HR) option is available as add-on to any Standard Model
U.S. Patent # 7,277,177 • U.S. Patent # 7,255,836
Specifications
| Performance |
| Operating range |
See Detection Capability table |
| Detection limit† (LDL, 3σ/24h) |
as low as 20 ppt in He, see below for Detection Specifications |
| Precision (1σ, greater of) |
± 0.75% or 1/3 of LDL |
| Accuracy (greater of) |
± 4% or LDL |
| Speed of response |
< 3 minutes to 95% |
| Environmental conditions |
10°C to 40°C, 30% to 80% RH (non-condensing) |
| Storage temperature |
-10°C to 50°C |
| Gas Handling System and Conditions |
| Wetted materials |
316L stainless steel, 10 Ra surface finish |
| Leak tested to |
1 x 10-9 mbar l / sec |
| Gas connections |
1/4” male VCR inlet and outlet |
| Sample inlet pressure |
10 − 125 psig (1.7 − 9.6 bara) |
| Sample flow rate |
0.5 – 1.8 slpm (gas dependent) |
| Sample gases |
Most inert matrices |
| Gas temperature |
Up to 60°C |
| H2 supply requirements* |
~15 sccm, 20 − 125 psig |
| Dimensions, H x W x D |
| Standard sensor |
8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm) |
| Weight |
| Standard sensor |
45 lbs (20.4 kg) |
| Electrical |
| Alarm indicators |
2 user programmable, 1 system fault, Form C relays |
| Power requirements |
100 − 240 VAC, 50/60 Hz |
| Power consumption |
450 Watts max. |
| Signal output |
Isolated 4−20 mA |
| User interfaces |
5.7” LCD touchscreen, 10/100 Base-T Ethernet, RS-232 |
|
RS-485, Modbus TCP (optional) |
| Data Storage |
Internal or external flash drive |
| Certification |
CE Mark |
| Patents |
| U.S. Patent #7,277,177 • U.S. Patent # 7,255,836 |
|
*H2 supply (maximum 10 ppm H2O and O2 impurity) is required for sample conditioningvia catalytic conversion.
For enhanced safety, a mixture of 3% H2/97% N2 can be used as an alternative to pure H2.
†LDL is dependent upon the quality of the sample gas and the integrity of the sampling system.
