Enabling Ultimate Moisture Detection Performance in Semiconductor Manufacturing

The HALO KA Max excels in trace-level H2O detection in bulk gases and specialty gases used in semiconductor manufacturing.

With the HALO KA Max, users can verify moisture impurity levels down to 100 ppt in semi bulk gases, with drift-free stability and virtually instant response to moisture upsets.

The HALO KA Max, based on Tiger Optics’ latest platform, offers exceptional speed and further improved usability in an all-inclusive and compact form factor. The analyzer is fast to install, easy to use and effortless to maintain, with built-in zero verification.

Pair the HALO KA Max with the HALO OK for ppt-level oxygen measurement to enjoy the benefits of advancements in laser-based technology for both of these critical contaminants.

Maximizing ultimate low-detection-level performance and speed of response, the HALO KA Max offers:

  • Parts per trillion (ppt) moisture detection capability in an array of gases
  • Absolute measurement (freedom from calibration)
  • Field proven lowest Cost of Ownership and ease of use
  • Wide dynamic range—over four orders of magnitude
  • Unprecedented speed of response at sub-ppb H2O levels
  • Compact footprint (two HALO KA Max fit in a 19” rack)


  • High-Purity Gases & Systems
  • Research & Development

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Download Specifications


Laboratory & Scientific

Stack, Process & CEMS

Detection Capability

Detection and Matrix Range LDL* Precision (1σ) @ zero
H2O in N2 0 – 5 ppm 100 ppt 40 ppt
H2O in He 0 – 1 ppm 100 ppt 10 ppt
H2O in Ar 0 – 2 ppm 100 ppt 20 ppt
H2O in H2 0 – 4 ppm 100 ppt 30 ppt
H2O in O2 0 – 2.5 ppm 100 ppt 20 ppt
H2O in CDA 0 – 4 ppm 100 ppt 30 ppt
*The Detection limit (LDL) is defined as 3σ over 24h
or the H2O drydown limit, whichever is higher


Operating range See Detection Capability table
Detection limit (LDL)* See Detection Capability table
Precision (1σ, greater of) ± 0.75% or 1/3 of LDL
Accuracy (greater of) ± 4% or LDL
Speed of response < 2 minutes to 95%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions
Gas connections 1/4” male VCR inlet and outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 10 − 125 psig (1.7 − 9.6 bara)
Flow rate 0.05 – 4 slpm
Sample gases Most inert, toxic, and passive matrices
Gas temperature Up to 60°C
Dimensions, H x W x D
Standard sensor 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm)
Sensor rack (fits up to two sensors) 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm)
Standard sensor 28 lbs (12.7 kg)
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 − 240 VAC, 50/60 Hz
Power consumption 40 Watts max.
Signal output Isolated 4−20 mA per sensor
User interfaces 5.7” LCD touchscreen, 10/100 Base-T Ethernet
USB, RS-232, RS-485
Data storage Internal or external flash drive
U.S. Patent #7,277,177
*The Detection limit (LDL) is defined as 3σ over 24h
or the H2O drydown limit, whichever is higher

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