The HALO 3 HF trace level hydrogen fluoride gas analyzer provides users with the unmatched accuracy, reliability, speed of response and ease of operation that users of Tiger Optics’ analyzers have come to know and expect. Featuring Tiger Optics’ proven Cavity Ring-Down Spectroscopy-based trace gas sensor in a very compact and economic analyzer design, this versatile instrument allows users to measure HF in most inert and passive gases with just one device. Users also enjoy freedom from requirements such as periodic sensor maintenance, span calibrations, purifier replacement and pump rebuilds. As a result, the HALO 3 is ideally suited to many applications where HF impurities are extremely critical, such as nitrogen trifluoride (NF3), sulfur hexafluoride (SF6) and fluorocarbon (CF4, C2F6, etc.) production and semiconductor utilization.

The HALO 3 HF offers:

  • Low single-digit parts per billion (ppb) detection capability
  • Absolute measurement (freedom from calibration gases)
  • Wide dynamic range
  • Low cost of ownership and operational simplicity
  • Clean technology—no external calibration gases required
  • Compact analyzer footprint


  • Gas Quality Control
  • Gaseous CRMs & Calibration Gas Mixtures
  • High-Purity Gases & Systems
  • Research & Development

Learn More


Laboratory & Scientific

Stack, Process & CEMS

Detection Capability

Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero
HF in N2 0 – 5 ppm 0.4 ppb 0.15 ppb
HF in He 0 – 1.3 ppm 0.4 ppb 0.05 ppb
HF in SF6 0 – 8 ppm 1.2 ppb 0.4 ppb
HF in NF3 0 – 7.5 ppm 0.6 ppb 0.2 ppb
HF in CF4 0 – 6 ppm 0.8 ppb 0.3 ppb
HF in C2F6 0 – 12 ppm 1.6 ppb 0.6 ppb
HF in C3F8 0 – 12 ppm 1.6 ppb 0.6 ppb
HF in C4F6 0 – 15 ppm 15 ppb 5 ppb
HF in C4F8 0 – 14 ppm 1.6 ppb 0.6 ppb


Operating range See Detection Capability table
Detection limit (LDL, 3σ/24h) See Detection Capability table
Precision (1σ, greater of) ± 0.75% or 1/3 of LDL
Accuracy (greater of) ± 4% or LDL
Speed of response < 1 minute to 90%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions
Wetted materials 316L stainless steel (optional corrosion-resistant material), 10 Ra surface finish
Gas connections 1/4” male VCR inlet and outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 10 − 125 psig (1.7 − 9.6 bara)
Flow rate Up to 1.8 slpm
Sample gases Most inert, toxic, passive and corrosive matrices
Gas temperature Up to 60°C
Dimensions, H x W x D
Standard sensor 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm)
Sensor rack (fits up to two sensors) 8.73″ x 19″ x 23.6″ (222 mm x 483 mm x 599 mm)
Standard sensor 28 lbs (12.7 kg)
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 − 240 VAC, 50/60 Hz
Power consumption 40 Watts max.
Signal output Isolated 4−20 mA per sensor
User interfaces 5.7” LCD touchscreen, 10/100 Base-T Ethernet, RS-232
802.11g Wireless (optional), Modbus TCP (optional)
U.S. Patent #7,277,177

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