HALO 3 HCl

The HALO 3 HCl trace level hydrogen chloride gas analyzer provides accuracy, reliability, speed of response and ease of operation. Featuring Tiger Optics’ proven Cavity Ring-Down Spectroscopy-based trace gas sensor in a very compact and economic analyzer design, this versatile instrument allows users to measure HCl in most inert and passive gases with just one device. Users also enjoy freedom from requirements, such as periodic sensor maintenance, span calibrations, purifier replacement and pump rebuilds. The HALO is suited to many applications where HCl impurities are extremely critical, such as semiconductor utilization.

The HALO 3 HCl offers:

  • Low single-digit parts per billion (ppb) detection capability
  • Absolute measurement (freedom from calibration gases)
  • Wide dynamic range
  • Low cost of ownership and operational simplicity
  • Clean technology—no external calibration gases required
  • Compact analyzer footprint

Applications

  • Air Quality
  • CEM Standards Preparation
  • Gas Quality Control
  • Gaseous CRMs & Calibration Gas Mixtures
  • High-Purity Gases & Systems
  • Research & Development

Serani™ Max Analyzer Interface Software allows remote access from your computer or laptop for the latest CRDS generation analyzers, such as the HALO KA Max and T-I Max. The Windows-based software package communicates with the analyzer through Ethernet and allows full control of the system from your desk.

Download Datasheet

Brand

Laboratory & Scientific

Stack, Process & CEMS

Detection Capability

 

Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero
HCl in N2 0 – 20 ppm 1.0 ppb 0.4 ppb
HCl in Clean Dry Air (CDA) 0 – 20 ppm 1.0 ppb 0.4 ppb
HCl in Hydrogen 0 – 10 ppm 1.0 ppb 0.4 ppb

Specifications

Performance
Operating range See Detection Capability table
Detection limit (LDL, 3σ/24h) See Detection Capability table
Precision (1σ, greater of) ± 0.75% or 1/3 of LDL
Accuracy (greater of) ± 4% or LDL
Speed of response < 1 minute to 90%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions
Wetted materials 316L stainless steel (corrosive gas-resistant version optional), 10 Ra surface finish
Gas connections 1/4” male VCR inlet and outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 10 − 125 psig (1.7 − 9.6 bara)
Flow rate Up to 1.8 slpm
Sample gases Most inert, toxic, passive and corrosive matrices
Gas temperature Up to 60°C
Dimensions, H x W x D
Standard sensor 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm)
Sensor rack
(fits up to two sensors)
8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm)
Weight
Standard sensor 28 lbs (12.7 kg)
Electrical and Interfaces
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 − 240 VAC, 50/60 Hz
Power consumption 40 Watts max.
Signal output Isolated 4−20 mA per sensor
User interfaces 5.7” LCD touchscreen, 10/100 Base-T Ethernet, RS-232
RS-485, Modbus TCP (optional)
Data Storage Internal or external flash drive
Certification CE Mark
Patents
U.S. Patent #7,277,177

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