The HALO 3 H2O analyzer provides users with the accuracy, reliability, speed of response and ease of operation. Featuring Tiger Optics’ powerful Cavity Ring-Down Spectroscopy-based moisture sensor in a compact and economic analyzer design, this versatile analyzer allows users to measure moisture in most inert, corrosive and toxic gases with just one device.
Users also enjoy reduced maintenance requirements such as periodic sensor maintenance, span calibrations, purifier replacement and pump rebuilds.
The HALO 3 H2O analyzer is ideally suited to many critical moisture measurement applications including fixed bulk gas continuous quality control, portable mobile analytical carts, process tool monitoring, air separation, gas cylinder quality control and many other demanding applications.
Designed for trace level moisture analysis, the HALO 3 H2O offers:
- Sub parts per billion (ppb) moisture detection capability in an array of gases
- Absolute measurement (freedom from calibration gases)
- Wide dynamic range—over four orders of magnitude
- Low cost of ownership and operational simplicity
- Clean technology—no external calibration gases required
- Compact analyzer footprint
- Low gas consumption to conserve rare and costly gas
Applications
- Air Separation Units & Nitrogen Plants
- Gaseous CRMs & Calibration Gas Mixtures
- High-Purity Gases & Systems
- Hydrogen Fuel Cells
- Nuclear Energy
- Research & Development
- Semiconductor Process Tools
- Syngas & Fuel Gas Production
Download DataSheet
Detection Capability
| Detection and Matrix |
Range |
LDL (3σ) |
Precision (1σ) @ zero |
| H2O in N2 |
0 – 20 ppm |
1.2 ppb |
0.4 ppb |
| H2O in He |
0 – 4 ppm |
0.25 ppb |
0.1 ppb |
| H2O in Ar |
0 – 9 ppm |
0.6 ppb |
0.2 ppb |
| H2O in H2 |
0 – 16 ppm |
1.0 ppb |
0.4 ppb |
| H2O in 2H2 |
0 – 14 ppm |
0.9 ppb |
0.3 ppb |
| H2O in O2 |
0 – 12 ppm |
0.7 ppb |
0.25 ppb |
| H2O in Clean Dry Air (CDA) |
0 – 18 ppm |
1.2 ppb |
0.4 ppb |
| H2O in CO |
0 – 24 ppm |
1.5 ppb |
0.5 ppb |
| H2O in CO2 (low range) |
0 – 25 ppm |
2.0 ppb |
0.7 ppb |
| H2O in CO2 (high range) |
0 – 70 ppm |
8 ppb |
3 ppb |
| H2O in SO2 |
0 – 60 ppm |
4 ppb |
1.2 ppb |
| H2O in Ne |
0 – 5 ppm |
0.3 ppb |
0.1 ppb |
| H2O in Kr |
0 – 11 ppm |
0.6 ppb |
0.2 ppb |
| H2O in Xe |
0 – 13 ppm |
0.8 ppb |
0.3 ppb |
| H2O in Cl2 |
0 – 25 ppm
(corrosion-resistant material recommended) |
1.5 ppb |
0.5 ppb |
| H2O in HCl |
0 – 50 ppm
(corrosion-resistant material recommended) |
3 ppb |
1.0 ppb |
| H2O in HBr |
0 – 100 ppm
(corrosion-resistant material required) |
12 ppb |
4 ppb |
| H2O in SF6 |
0 – 15 ppm |
1.0 ppb |
0.4 ppb |
| H2O in NF3 |
0 – 20 ppm |
2.5 ppb |
0.9 ppb |
| H2O in CF4 |
0 – 15 ppm |
4 ppb |
1.2 ppb |
| H2O in C2F6 |
0 – 15 ppm |
3 ppb |
1.0 ppb |
| H2O in C3F8 |
0 – 20 ppm |
3 ppb |
1.0 ppb |
| H2O in C4F6 |
0 – 25 ppm |
150 ppb |
50 ppb |
| H2O in C4F8 |
0 – 20 ppm |
3 ppb |
1.0 ppb |
| H2O in C5F8 |
0 – 32 ppm |
30 ppb |
10 ppb |
| H2O in H2S |
0 – 40 ppm |
200 ppb |
70 ppb |
| H2O in H2Se‡ |
0 – 32 ppm |
30 ppb |
10 ppb |
H2O in 1% GeH4/99%
H2 mixture: |
0 –16 ppm |
7 ppb |
2.5 ppb |
H2O in 10% GeH4/90%
H2 mixture: |
0 – 16 ppm |
35 ppb |
12 ppb |
‡ Corrosive gas version recommended for H2O concentration that could exceed 1 ppm.
‡ Detection in H2Se requires special analyzer configuration dedicated to service in H2Se.
