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HALO 3 CH4 product image

HALO 3 CH4

The HALO 3 CH4 trace level methane gas analyzer is ideally suited to silicon wafer manufacturing monitoring, fixed bulk gas continuous quality control, process tool monitoring, air separation, gas cylinder quality control and many other demanding applications.
Accuracy, reliability, speed of response and ease of operation are features of Tiger Optics’ proven Cavity Ring-Down Spectroscopy-based trace gas sensor technology. With compact and economic analyzer design, this versatile analyzer allows users to measure methane in most inert and passive gases with just one device. Users also enjoy freedom from requirements such as periodic sensor maintenance, span calibrations, purifier replacement and pump rebuilds.

Features:

  • Low single-digit parts per billion (ppb) methane detection capability in an array of gases
  • Absolute measurement (freedom from calibration gases)
  • Wide dynamic range
  • Low cost of ownership and operational simplicity
  • Clean technology—no external calibration gases required
  • Compact analyzer footprint.
  • NEW  “CO2 Model” for ppb-level detection in pure carbon dioxide.

Applications

  • Air Separation Units & Nitrogen Plants
  • Gas Quality Control
  • Gaseous CRMs & Calibration Gas Mixtures
  • High-Purity Gases & Systems
  • Research & Development.

Download Data Sheet

Brand

Laboratory & Scientific

Stack, Process & CEMS

Detection Capability - Standard Model

Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero
CH4 in N2 0 – 8 ppm 1.6 ppb 0.6 ppb
CH4 in He 0 – 5 ppm 1.1 ppb 0.4 ppb
CH4 in Ar 0 – 7 ppm 1.4 ppb 0.5 ppb
CH4 in H2 0 – 8 ppm 1.6 ppb 0.6 ppb
CH4 in O2 0 – 6 ppm 1.1 ppb 0.4 ppb

Detection Capability - CO2 Model

Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero
CH4 in CO2 0 – 70 ppm 35 ppb 12 ppb
CH4 in N2 0 – 60 ppm 30 ppb 10 ppb

Specifications

Performance
Operating range See Detection Capability tables
Detection limit (LDL, 3σ/24h) See Detection Capability tables
Precision (1σ, greater of) ± 0.75% or 1/3 of LDL
Accuracy (greater of) ± 4% or LDL
Speed of response < 1 minute to 95%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions
Wetted materials 316 stainless steel (optional corrosion-resistant material), 10 Ra surface finish
Gas connections 1/4″ male VCR inlet and outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 10 − 125 psig (1.7 − 9.6 bara)
Flow rate Up to 1.8 slpm
Sample gases Most inert, toxic, passive and corrosive matrices
Gas temperature Up to 60°C
Dimensions, H x W x D
Standard sensor 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm)
Sensor rack (fits up to two sensors) 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm)
Weight
Standard sensor 28 lbs (12.7 kg)
Electrical
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 − 240 VAC, 50/60 Hz
Power consumption 40 Watts max.
Signal output Isolated 4−20 mA per sensor
User interfaces 5.7” LCD touchscreen, 10/100 Base-T Ethernet, RS-232
RS-485, Modbus TCP (optional)
Data Storage Internal or external flash drive
Certification CE Mark
Patents
U.S. Patent #7,277,177
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